The graphite used in graphite boat has good electrical conductivity and thermal conductivity.

When the adjacent plates of graphite boat is connected with alternating current, the positive and negative poles will be formed between the adjacent plates. When there is a certain pressure and gas in the chamber of the graphite boat, glow discharge will occur between the two plates.

The glow discharge can decompose the SiH4 and NH3 gas in the graphite boat. The Si and N ions formed by this process will combine to form SiNx molecules. SiNx molecules are deposited on the surface of silicon wafer to achieve the purpose of coating.

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