The thermal stability of the methane used for the CFC is higher than that of other hydrocarbon gases.

At a temperature of 1000℃, the CVD of methane used for the CFC deposits pyrolytic carbon at a small rate. At 1000℃, the decomposition rate of methane is less than 5%.   

The methane used for the CFC decomposes in bulk only when the temperature is above 1050℃. When the methane is the precursor, the deposition rate of pyrolytic carbon increases nonlinearly with the extended deposition time.

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