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Effect of Reactive Gas Sources on the Rate of CFC Deposition

Release time: 2022-04-23

The data show that the different reactive gas sources have different effects on the deposition rate of the CFC.

 

Using propylene as the gas source, CFC with a density higher than 1.65g/cm2 can be manufactured. The densification process takes about 8~12h.

 

If propane is used as the reaction gas, the densification process of CFC takes approximately 14h. The carbon deposition rate of methane is much slower than propylene and propane, which is mainly due to the high stability of the hydrocarbon group during pyrolysis.


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