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Molecular Deposition Mechanism of CFC

Release time: 2026-09-28

The article presents a brief introduction to the molecular deposition mechanism of CFC.

 

Under low concentrations of the reactant gas, the deposition rate of CFC is low.

 

In the gas-phase reaction, aromatic planar molecules generated in CFC arrange conically around spherical particles or align parallel to the substrate surface, forming dense PyC with high orientation.


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